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| 论文题目: | Spatiotemporal evolution and its impact on the deposition behavior of atmospheric TEOS/O2/Ar plasma: A numerical study |
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| 作者: | Jiaxin Chang, Dong Dai, Cheng Zhang, Tao Shao |
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| 刊物名称: | Plasma Processes and Polymers |
| 年: | 2024 |
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Spatiotemporal evolution and its impact on the deposition behavior of atmospheric TEOS/O2/Ar plasma: A numerical study